According to different preparation methods and application fields, industrial gases can be divided into bulk gases and special gases. Special gases can be divided into high-purity gases, standard gases and electronic special gases. The downstream applications of electronic special gases are extensive, including integrated circuits, display panels, photovoltaics, LEDs, etc. The main production processes of special gases include gas synthesis, gas purification, gas blending, gas cylinder treatment, gas filling, etc. Gas filling refers to filling gas into pressure vessels such as gas cylinders through pressure difference. The improvement of the purity of special gases is the core technical bottleneck. Integrated circuits have strict requirements for the purity of electronic special gases. Because in the chip processing process, even trace impurities may cause major defects in the product. The higher the purity of special gases, the higher the yield and the better the performance of the product. With the continuous development of IC chip manufacturing process technology, the production accuracy of products is getting higher and higher, and higher purity requirements are also put forward for electronic special gases used in integrated circuit manufacturing.